The results of 128×128 SW/MW twocolor HgCdTe infrared focal plane arrays (IRFPAs) were presented. By B+implantation, mesaisolation etching, sidewall passivation, sidewall metallization and flipchip hybridization with readout integrated circuit (ROIC),128×128 SW/MW twocolor HgCdTe IRFPAs detector was fabricated from a fourlayer ppPN heterojunction of Hg1-xCdxTe film grown by molecular beam epitaxy and insitu doping techniques. The micromesa fillfactor of (50×50)μm2 twocolor detector arrays was doubled by optimizing the wetchemical etching process. The staring SW/MW twocolor HgCdTe IRFPAs detector performed high uniformity and normal photoelectric properties. At liquid nitrogen temperature, the cutoff wavelengths of the twocolor IRFPAs were 2.7μm and 4.9μm, respectively, and the peak detectivities (D*λp) were 1.42×1011cmHz1/2/W and 2.15×1011cmHz1/2/W respectively.
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YE Zhen-Hua, YIN Wen-Ting, HUANG Jian, HU Wei-Da, CHEN Lu, LIAO Qin-Jun, CHEN Hong-Lei, LIN Chun, HU Xiao-Ning, DING Rui-Jun, HE Li.128×128 SW/MW two-color HgCdTe IRFPAs[J]. Journal of Infrared and Millimeter Waves,2010,29(6):415~418