12.5 μm 1 024×1 024 long-wavelength infrared InAs/GaSb Type II superlattice focal plane arrays
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National Key Laboratory of Infrared Detection Technologies, Shanghai Institute of Technical Physics, Chinese Academy of Sciences,Shanghai 200083,China

Clc Number:

TN304.2;TN305

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Project supported by National Natural Science Foundation of China (NSFC) Fund (62004205,62104236,62104237,62222412), National Key Research and Development Program of China (2022YFB3606800), Shanghai Rising-Star Program(21YF1455000,22YF1455800) and Special Fund for Innovation of SITP, CAS (CX-455).

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    Abstract:

    In this paper, the research results of 12.5 μm long-wavelength infrared InAs/GaSb superlattice focal plane arrays were reported. The superlattice structure was grown on GaSb substrate using molecular beam epitaxy (MBE) technology. The respective structure of absorption region is 15ML ( InAs) /7ML ( GaSb). The detector adopts PBπBN double barrier structure to suppress the dark current. A long-wave focal plane detector with the size of 1 024×1 024 and the pixel center-to-center distance of 18 μm was developed. The detector is packaged by a metal dewar, and a superlattice long-wavelength detector cryocooler assembly is formed by coupling with a refrigerator. At 60 K measurement, the detector has 50% cut-off wavelength of 12.5 μm. The detector has a peak detectivity of 6.6×1010 cm?Hz1/2/W , dead pixels rate of 1.05% and a noise equivalent temperature difference (NETD) is 21.2 mK. The Infrared images of the test have been taken clearly using the infrared imaging detector.

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BAI Zhi-Zhong, HUANG Ming, XU Zhi-Cheng, ZHOU Yi, ZHU Yi Hong, SHEN Yi-Ming, ZHANG Jun-Lin, CHEN Hong-Lei, DING Rui-Jun, CHEN Jian-Xin.12.5 μm 1 024×1 024 long-wavelength infrared InAs/GaSb Type II superlattice focal plane arrays[J]. Journal of Infrared and Millimeter Waves,2024,43(6):738~743

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History
  • Received:September 19,2023
  • Revised:November 07,2024
  • Adopted:September 27,2023
  • Online: October 28,2024
  • Published:
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