The 760 nm-vertical cavity surface emitting laser for the oxygen sensing
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1.State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics , Chinese Academy of Sciences, Changchun 130033,China;2.University of Chinese Academy of Sciences, Beijing 100049,China;3.Ace Photonics Co. Ltd., Changchun 130102, China

Clc Number:

TN248.4

Fund Project:

Supported by the Major Program of the National Natural Science Foundation of China (62090060) ; the National Natural Science Foundation of China (61874117, 61874119, 11774343) ; and the Science and Technology Development Project of Jilin Province (20220201063GX)

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    Abstract:

    A 760 nm single-mode, wavelength-tunable Vertical Cavity Surface-Emitting Laser (VCSEL) for oxygen sensing has been reported. The design method and device fabrication results of the 760 nm VCSEL have been reported in detail. By analyzing the gain characteristics of AlGaAs quantum wells, the composition and thickness of the quantum wells were determined, and the VCSEL structure with a gain peak and cavity mode mismatch of 10 nm at room temperature was designed. The single-mode power of the VCSEL exceeds 2 mW when the operating temperature is 25 °C, the side-mode suppression ratio (SMSR) is 28.1 dB, and the full angle of the divergence angle is 18.6°. As the operating current increases, the divergence angle of the VCSEL laser increases, but the far-field is still a circular and symmetrical spot with a Gaussian shape. By tuning the operating temperature and operating current of the VCSEL laser, the single-mode wavelength of the VCSEL can be continuously tuned from 758.740 nm to 764.200 nm. The current tuning coefficient of the laser wavelength changes from 1.120 nm/mA to 1.192 nm/mA, and the temperature tuning coefficient changes from 0.072 nm/℃ to 0.077 nm/℃ when the VCSEL operates at 15-35 °C. The SMSR of the VCSEL laser reaches 32.6 dB and 30.4 dB near the two characteristic absorption wavelengths of oxygen.

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LIU Tian-Jiao, XU Yue-Hui, ZHANG Jian-Wei, ZHANG Xing, ZHANG Zhuo, GONG Yu-Xiang, ZHOU Yin-Li, MU Jing-Fei, CHEN Chao, WU Hao, NING Yong-Qiang, WANG Li-Jun. The 760 nm-vertical cavity surface emitting laser for the oxygen sensing[J]. Journal of Infrared and Millimeter Waves,2023,42(4):441~449

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History
  • Received:November 24,2022
  • Revised:June 05,2023
  • Adopted:February 01,2023
  • Online: June 02,2023
  • Published:
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