Growth and characterization of InAsP/InAsSb superlattices by Metal Organic Chemical Vapor Deposition for mid-wavelength detection
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1.The School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China;2.The Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China;3.The School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China;4.Nano Science and Technology Institute, University of Science and Technology of China, Suzhou 215123, China

Clc Number:

TN304

Fund Project:

Supported by National Natural Science Foundation of China (61874179, 62074156, 11874390)

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    Abstract:

    “Ga-free” strain-balanced InAsP/InAsSb superlattices grown on InAs substrate by Metal Organic Chemical Vapor Deposition(MOCVD)was proposed and implemented to explore its feasibility as an infrared absorption material. First, the band gaps of InAsP/InAsSb superlattices were calculated by k·p method, and it was found that their cut-off wavelength cover mid-wavelength infrared to long wave infrared region. Then, InAs0.8P0.2/InAs0.7Sb0.3 superlattices were chosen and grown on InAs substrate by MOCVD. XRD measurement shows that the lattice mismatches between the InAs substrate peak and 0th order satellite peak of superlattices is only 61", indicating strain balance condition is achieved. AFM test for surface morphology shows its root mean square roughness is only 0.4 nm for 5×5 μm2 regions. The low-temperature PL spectra shows strong superlattice emission with peak located around 3.3 μm, which is closed to the design value. All the results indicate the feasibility and practicality of strain balanced InAsP/InAsSb superlattices grown by MOCVD for infrared detection.

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HUAI Yun-Long, ZHU Hong, ZHU He, LIU Jia-Feng, LI Meng, LIU Zhen, HUANG Yong. Growth and characterization of InAsP/InAsSb superlattices by Metal Organic Chemical Vapor Deposition for mid-wavelength detection[J]. Journal of Infrared and Millimeter Waves,2022,41(6):995~1001

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History
  • Received:May 16,2022
  • Revised:November 09,2022
  • Adopted:July 04,2022
  • Online: November 07,2022
  • Published:
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