1.Key Laboratory of Terahertz Technology， Shanghai Institute of Microsystem and Information Technology， Chinese Academy of Sciences， Shanghai 200050， China;2.State Key Laboratory of Transducer Technology， Shanghai Institute of Technical Physics， Chinese Academy of Sciences， Shanghai 200083， China;3.Key Laboratory of Infrared Imaging Materials and Detectors， Shanghai Institute of Technical Physics， Chinese Academy of Sciences， Shanghai 200083， China;4.University of Chinese Academy of Science， Beijing 100049， China;5.Department of Microtechnology and Nanoscience， Chalmers University of Technology， Gothenburg SE-41296， Sweden

TN215

Supported by the National Natural Science Foundation of China （Nos. 62075229 and 61775228）， and the International Science and Technology Cooperation Program of Shanghai （No.20520711200）