1.State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;2.College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 101408, China
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Supported by National Basic Research Program of China (2018YFA0209104),National Natural Science Foundation of China (61790582)
ZHENG Da-Nong, SU Xiang-Bin, XU Ying-Qiang, NIU Zhi-Chuan. High gain and low dark current AlInAsSb avalanche photodiodes grown by quaternary digital alloys[J]. Journal of Infrared and Millimeter Waves,2021,40(2):172~177
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