LOW-LOSS CPW LINE ON LOW-RESISTIVITY SILICON

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LOW-LOSS CPW LINE ON LOW-RESISTIVITY SILICON
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                        GE Yu-Ping1,GUO Fang-Min 1,2,WANG Wei-Ming1,XU Xin YOU Shu-Zhen1,SHAO Li1,YU Shao-Xin1,ZHU Zi-Qiang1,LU Wei2GE Yu-Ping1,GUO Fang-Min 1,2,WANG Wei-Ming1,XU Xin YOU Shu-Zhen1,SHAO Li1,YU Shao-Xin1,ZHU Zi-Qiang1,LU Wei2

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GE Yu-Ping, GUO Fang-Min, WANG Wei-Ming, XU Xin YOU Shu-Zhen, SHAO Li, YU Shao-Xin, ZHU Zi-Qiang, LU Wei. LOW-LOSS CPW LINE ON LOW-RESISTIVITY SILICON[J]. Journal of Infrared and Millimeter Waves,2004,23(5):357~359

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