DEVELOPMENT OF INFRARED SPECTROSCOPIC ELLIPSOMETER BY SYNCHRONOUS ROTATION OF THE POLARIZER AND ANALYZER

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DEVELOPMENT OF INFRARED SPECTROSCOPIC ELLIPSOMETER BY SYNCHRONOUS ROTATION OF THE POLARIZER AND ANALYZER
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HUANG Zhi Ming JIN Shi Rong CHEN Shi Wei CHEN Min Hui SHI Guo Liang CHEN Liang Yao CHU Jun Hao. DEVELOPMENT OF INFRARED SPECTROSCOPIC ELLIPSOMETER BY SYNCHRONOUS ROTATION OF THE POLARIZER AND ANALYZER[J]. Journal of Infrared and Millimeter Waves,1998,17(5):321~326

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