SECONDARY ION MASS SPECTROMETRY OF ERBIUM AND OXYGEN CO IMPLANTED IN GaAs

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SECONDARY ION MASS SPECTROMETRY OF ERBIUM AND OXYGEN CO IMPLANTED IN GaAs
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                        CHEN Chen Jia LI Hai Tao WANG Xue ZhongCHEN Chen Jia LI Hai Tao WANG Xue Zhong

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CHEN Chen Jia LI Hai Tao WANG Xue Zhong. SECONDARY ION MASS SPECTROMETRY OF ERBIUM AND OXYGEN CO IMPLANTED IN GaAs[J]. Journal of Infrared and Millimeter Waves,1997,16(6):413~417

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