THEORETCAL AND EXPERIMENTAL STUDY OF LASER DETECTING TECHNIQNE FOR MICRO BULK DEFECTS IN SILICON

Home > Archive>Volume 16, Issue 3, 1997 >174-178

THEORETCAL AND EXPERIMENTAL STUDY OF LASER DETECTING TECHNIQNE FOR MICRO BULK DEFECTS IN SILICON
DOI:
                        
CSTR:
                        [cstr]
                    
Author:
                        
Affiliation:
Clc Number:TN304.12 TN304.07
Fund Project:

Article

Figures

Metrics

Reference

Cited by

Materials

Comments

Abstract:

Reference

Cited by

Get Citation

. THEORETCAL AND EXPERIMENTAL STUDY OF LASER DETECTING TECHNIQNE FOR MICRO BULK DEFECTS IN SILICON[J]. Journal of Infrared and Millimeter Waves,1997,16(3):174~178

Copy

Article Metrics

Abstract:
PDF:
HTML:
Cited by:

History

Received:
Revised:
Adopted:
Online:
Published:

Home

Introduction

Editorial Board

Authors' Guidelines

Open Access

Publishing Ethics

Downloads

Copyright

Contact Us

中文版

Get Citation

Share

Article Metrics

History

Article QR Code