FTIR STUDY OF OXYGEN IN SILICON
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TN211

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    Abstract:

    Silicon crystals of different oxygen contents have been investigated by means of infrared absorption spectroscopy at 300K and 4.2K. It is seen from the experiments that the absorption band at 1127cm~(-1)at low temperatures (80~4.2K) is due to oxygen absorp- tion.

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Ma Bilan, Zhu Jinbin, Wu Jiangen Zhang Jichang, Zhou Shoutong, Qu Fengyuan. FTIR STUDY OF OXYGEN IN SILICON[J]. Journal of Infrared and Millimeter Waves,1992,11(4):327~330

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