HgCdTe APD is one of the developing trends of third generation inferred FPA detectors. This article presents a new method to fabricate HgCdTe APD by Ion Beam Etch (IBE), and discusses the relation of gain to cutoff wavelength and depletion region thickness. A gain of 1000 at a bias of 17V was achieved in a HgCdTe APD with a cutoff wavelength of 4.8μm fabricated by this method. The noise factor, F, is calculated after a noise spectrum test.
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LI Hao, LIN Chun, ZHOU Song-Min, WANG Xi, SUN Quan-Zhi. HgCdTe APD fabricated by Ion Beam Etch[J]. Journal of Infrared and Millimeter Waves,2019,38(2):223~227