Design and implementation of high performance single-photon avalanche diode in 180 nm CMOS technology
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School of Physics and Optoelectronics, Xiangtan University,Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on a Chip,School of Physics and Optoelectronics, Xiangtan University,Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on a Chip,School of Physics and Optoelectronics, Xiangtan University,Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on a Chip

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This work is supported by the State Key Program of National Natural Science of China (Grant No.61233010), by the National Natural Science Foundation of China (Grant No.61274043) and by Hunan Provincial Natural Science Fund for Distinguished Young Scholars (2015JJ1014).

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    Abstract:

    A wide spectral range and fast Single-photon avalanche diode (SPAD) chip which can be integrated with actively quenching circuit for large array realization is designed and implemented. The precise circuit model of SPAD for simulating the static and dynamic behaviors in Geiger-mode is used. The device with an 8 μm diameter active area is fabricated in GSMC 180 nm CMOS image sensor (CIS) technology. With the efficient device’s structure, the low breakdown voltage is 15.2 V and quenching time is 7.9 ns. Additionally, the device achieves wide spectral sensitivity and enables maximum photon detection probability (PDP) of 15.7% from 470 to 680 nm of wavelength at low excess voltage. Moreover, it exhibits a relatively low dark count rate (DCR) at room temperature.

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JIN Xiang-Liang, CAO Can, YANG Hong-Jiao. Design and implementation of high performance single-photon avalanche diode in 180 nm CMOS technology[J]. Journal of Infrared and Millimeter Waves,2018,37(1):30~35

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History
  • Received:June 30,2017
  • Revised:September 26,2017
  • Adopted:September 27,2017
  • Online: March 19,2018
  • Published:
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