基于T法的光谱仪动镜速度复合控制
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上海技术物理研究所

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国家重点研发计划


Moving Mirror Speed Compound Control of the Fourier Transform Spectrometer Based on T-method
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Shanghai Institutes of Technical Physics

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the National Key Research and Development Program of China

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    摘要:

    傅里叶变换光谱仪是一种精密的红外探测仪器,它采用迈克尔逊式干涉分光方式,动镜是其中一个核心部件。动镜运动速度的均匀性和稳定性直接影响了后续干涉图的质量,所以必须对动镜进行高精度的运动控制。对于某些动镜低速应用场合的傅里叶光谱仪,常规的M法测速已经不能满足测速精度的要求了。另外,动镜低速运动时,速度稳定性更容易受外界力学扰动的影响。基于动镜低速运动的平稳性需求,文中对基于T法测速的动镜运动控制技术进行了研究,提出了求取速度实测值和速度期望值的高精度算法,并通过建立被控对象的数学模型和动力学方程,得到速度前馈控制量,进而设计了基于速度前馈的复合速度控制器。该设计的动镜速度控制算法由FPGA硬件平台实现,并应用于傅里叶光谱仪实验平台。实验结果表明,采用T法测速控制系统获得动镜运动匀速区速度峰峰值误差是0.0182,速度均方根值误差是0.0027。为测试文中动镜速度控制系统的抗干扰能力,在干涉仪安装平台动镜运动方向施加5mg正弦激励力进行定频扫描,频率范围是2~200Hz,实验结果表明,在各频率点的力学激励下,采用T法测速和复合控制,速度峰峰值误差最大是0.0679,速度均方根值误差最大是0.0205,动镜速度平稳性依然能满足傅里叶光谱仪的性能要求。该设计为傅里叶光谱仪低速高平稳性动镜速度控制的实现提供了一种技术途径,同时也使得傅里叶光谱仪有了更广阔的应用场景。

    Abstract:

    The Fourier transform spectrometer (FTS) is a precision infrared detection instrument. It adopts Michelson interference splitting, and the moving mirror is one of the core components. The uniformity and stability of the moving mirror’s speed directly affect the quality of the subsequent interferogram, so it is necessary to carry out high-precision motion control of the moving mirror. For some FTS with moving mirror in low-speed motion, the traditional M-method can no longer meet the requirements of speed measurement accuracy. In addition, when the moving mirror moves at a low speed, the speed stability is more easily affected by external mechanical disturbance. Based on the stability requirement of the low-speed moving mirror, this paper studies the motion control of the moving mirror based on the T-method measuring speed. It proposes a high-precision algorithm to obtain the measured and expected value of the velocity. By establishing the mathematical model and dynamic equation of the controlled object, the speed feedforward input is obtained, and then the compound speed controller based on the feedforward control is designed. The control algorithm is implemented by the FPGA hardware platform and applied to the FTS. The experimental results show that the error of the peak-to-peak velocity is 0.0182, and the error of the root mean square (RMS) velocity is 0.0027. To test the anti-interference ability of the moving mirror speed control system, 5mg sine excitation force is applied in the motion direction of the moving mirror on the FTS for frequency-fixed scanning. The frequency range is 2-200Hz. The experimental results show that under the excitation, the maximum error of the peak-to-peak velocity is 0.0679, and the maximum error of the RMS velocity is 0.0205. The speed stability of the moving mirror can still meet the performance requirements of the FTS. This design provides a technical means for realizing the speed control of the moving mirror with low speed and high stability. Also it makes the FTS have wider applications.

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  • 收稿日期:2025-01-16
  • 最后修改日期:2025-03-03
  • 录用日期:2025-03-07
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