1.集成电路材料全国重点实验室,中国科学院上海微系统与信息技术研究所,上海,200050;2.中国科学院大学 材料与光电研究中心,北京,100049;3.上海理工大学,光电信息与计算机工程学院,上海,200093
国家自然科学基金(批准号:61927813, 62435020, 61991432)
1.State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China;2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;3.School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
Supported by the National Natural Science Foundation of China (61927813, 62435020, 61991432)