1.中国科学院半导体研究所光电材料与器件重点实验室,北京 100083;2.中国科学院大学材料科学与光电技术学院,北京 100049;3.中国科学院大学材料科学与光电工程中心,北京 100049;4.无锡芯光互连技术研究院,江苏 无锡 214101
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1.Key Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing100083, China;2.College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing100049, China;3.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing100049, China;4.Wuxi Institute of Interconnect Technology, Co.,Ltd Wuxi, China
Supported by National Key R&D Program of China (2021YFB2800201).; the Strategic Priority Research Program of Chinese Academy of Sciences (XDB43000000)