刘西钉 江美玲
O551.1 TK113
LIU Xi Ding JIANG Mei Ling FENG Xiao Mei DING Ai Di LIANG Ping Zhi SHEN Xue Chu
采用多晶硅薄膜材料作为热敏电阻材料，以普通的ＩＣ工艺及微机械加工技术研制成功了在室温下工作的红外微测辐射热计，其多晶硅电阻温度系数为－２％℃－１，探测率Ｄ＊达２×１０８ｃｍ·Ｈｚ１／２·Ｗ－１．
刘西钉 江美玲.非制冷红外微测辐射热计的研制[J].红外与毫米波学报,1997,16(6):459~462]. LIU Xi Ding JIANG Mei Ling FENG Xiao Mei DING Ai Di LIANG Ping Zhi SHEN Xue Chu. DEVELOPMENT OF UNCOOLED INFRARED MICROBOLOMETER[J]. J. Infrared Millim. Waves,1997,16(6):459~462.]
